At all costs

Destiny must be in your own hands

Otherwise, you will be subject to others everywhere

In the field of sensors

The localization process of MEMS sensors is not a smooth road

Even full of thorns

Rise to the challenge and move forward bravely

It has become an important mission and responsibility for every Chinese enterprise

Recently, the "Russia-Ukraine conflict" has aroused widespread global attention, and various media have focused on the trend of the war and its subsequent impact, and have expressed their views and opinions, and various industries, including economy, energy, aerospace, culture, sports and other institutions, have made predictions and judgments on the future situation.

Although we cannot judge what the consequences of this conflict will be in the future international form, one thing is certain, that is: In any case, the fate must be in our own hands, otherwise we will be controlled by others everywhere! After the outbreak of the Russian-Ukrainian conflict, Russia has been subject to various sanctions by Western countries, the financial system has been seriously affected, and network communications have been paralyzed for part of the time.

At present, European and American countries have announced a blockade of Russian semiconductor raw material exports, and Japan has followed the United States to carry out export controls on high-tech products with advanced technologies such as Russian chips and robots. In addition, the scope of the sanctions to be adopted by the United States will also include targeted exports: restricting the export of critical goods, for example, preventing foreign companies from selling to Russia any goods containing American technology, including hardware and software products, especially automobiles, smartphones, and semiconductors that are indispensable for consumer electronics.

From this to this, how should China develop in the field of high technology?

We can think of the recent US restrictions on China's semiconductor materials and high-end technology, the purpose of which is to restrict China's development in the high-tech field. Semiconductor materials are necessary materials for the manufacture of chips, and now our society is inseparable from the network, and a good chip even directly determines the achievements of a country's network construction. Therefore, since 2014 (or even earlier), China has strengthened the localization process of the development of the integrated circuit industry, ensured the rapid rise of related industries, and broken through the dilemma of "stuck neck" in the field of sensors, especially high-end MEMS sensors.

The process of localization of MEMS sensors is not a smooth road, and there will be many problems. For example, the domestic chip design software is immature and the penetration rate is low, the R&D capability is weak, the core technology is lacking, the production process equipment is backward, the stability of the product is low, the lack of independent research and development products, the problem of product homogeneity is prominent, the conversion rate of scientific research achievements is low, the market acceptance rate is not high, the scale of the enterprise is small, and the mass production is difficult to guarantee.

Adversity bursts out with energy to motivate Chinese enterprises to forge ahead

Difficulties exist, but they also inspire the determination of a group of enterprises with lofty ambitions. Beijing Smart Sensor Technology Co., Ltd. (hereinafter referred to as Smart Sensor) is such a representative of the enterprise that faces difficulties and moves forward bravely.

Founded in 2018, Smart Sensor is a high-tech enterprise dedicated to the R&D, production and sales of MEMS sensors. The core members of the team are from the School of Micro/Nano Electronics of Peking University and have more than 20 years of experience in MEMS sensor research. Based on the achievement transformation mechanism of the Beijing-Tianjin-Hebei National Technology Innovation Center, the company has a number of independent research and development patents, strong technical force, and the core R&D personnel have graduate degree or above and many years of experience in MEMS related fields.

From the very beginning, Smart Sensor's products have been benchmarked against high-end imported MEMS sensor products, developed and produced a full range of MEMS pressure sensors in the fields of industrial differential pressure, medical health, consumer electronics, aerospace and other fields, and mastered the six core technologies including the design, production, packaging, calibration and core process technology of sensor products, and is committed to becoming a professional and leading provider of MEMS pressure sensor chips, modules and professional solutions.

In terms of high-precision AD design, a multi-stage structure with variable rate is adopted. At the sampling rate of 1Hz~10Hz, different significant digits can be achieved by variable oversampling rate.

In terms of stress isolation structure technology, the chip stress isolation structure design process reduces the influence of plastic encapsulation material on the performance of the pressure gauge.

In terms of temperature calibration control technology, temperature calibration and simulation technology are adopted.

In terms of open molding technology, the structure of the injection molding head is improved, the open structure is realized, and the injection molding material is modified to reduce its own stress, and at the same time improve the tightness, so that the packaging stress is reduced as much as possible.

In terms of Sensor pressure-sensing membrane technology, the design and manufacturing process of ultra-thin pressure-sensitive membrane as low as 2μm is adopted.

In terms of sensor and ASIC integration technology, the original pressure sensing film and IC are taped out separately and then laminated to the synchronous tape-out integration mode, which solves the compatibility problem between MEMS sensing film and IC process.

Compared with similar products in the world, the integrated pressure sensor of Smart Sensor has obvious advantages in technology, production, cost, area and other aspects: in view of the difficulty of producing the two-piece stacking process, the single-chip integration method is adopted, which reduces the process complexity, and completely relies on the mature IC processing platform, without the support of the special packaging process platform; 4. The output of a single wafer chip is 4 times that of similar products, and the production cost is only 1/4 of it; the calibration line is designed by itself, and the cost is 1/5 to 1/3 of the imported line.

Smart Sensor pressure sensor series products

Smart Sensor's products also have the characteristics of high precision, high resolution, high adaptability to complex working conditions and low power consumption: through low drift, low noise pressure sensor chip design and monolithic integrated manufacturing process, temperature compensation algorithm, the accuracy of linearity, temperature drift and zero drift is 1% At the same time, the 24-bit digital conversion circuit is designed to achieve the measurement accuracy of 1Pa atmospheric pressure, and the automotive automotive grade products can be applied to the strict working conditions such as -40°C~125°C temperature, and the power consumption is only 1Hz and the current is 2.5μA.

Smart Sensor is well aware of the importance of the localization of sensors to the development of the industry, always adheres to the concept of independence, controllability and innovation, constantly consolidates its own technical strength, shortens the gap between manufacturing technology and production capacity with developed countries or regions, and gradually becomes an influential sensor solution provider in China.